Invention Grant
- Patent Title: Table device and conveyance device
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Application No.: US14901378Application Date: 2013-12-18
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Publication No.: US09723917B2Publication Date: 2017-08-08
- Inventor: Toshinori Satou
- Applicant: NSK LTD.
- Applicant Address: JP Shinagawa-ku, Tokyo
- Assignee: NSK LTD.
- Current Assignee: NSK LTD.
- Current Assignee Address: JP Shinagawa-ku, Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2013-138731 20130702
- International Application: PCT/JP2013/083968 WO 20131218
- International Announcement: WO2015/001688 WO 20150108
- Main IPC: A47B11/00
- IPC: A47B11/00 ; A47B13/08 ; G03F7/20 ; F16C29/02 ; F16C29/06 ; F16C32/06 ; F16C29/00

Abstract:
A table device including: a first base including a first reference surface; a second base including a second reference surface, and movable on the first reference surface in a direction parallel to a first axis; a first bearing member provided to the second base, and forming a gas bearing between the first bearing member and the first reference surface; a second bearing member provided to the second base, apart from the first bearing member relative to a direction parallel to a second axis perpendicular to the first axis, and forming a gas bearing between the second bearing member and the first reference surface; and a table movable on the second reference surface. A distance between the first bearing member and the second bearing member is longer than a dimension of a moving range of the table relative to the direction parallel to the second axis.
Public/Granted literature
- US20160135588A1 TABLE DEVICE AND CONVEYANCE DEVICE Public/Granted day:2016-05-19
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