Invention Grant
- Patent Title: Apparatus for producing trichlorosilane and method for producing trichlorosilane
-
Application No.: US13414083Application Date: 2012-03-07
-
Publication No.: US09724665B2Publication Date: 2017-08-08
- Inventor: Mitsutoshi Narukawa
- Applicant: Mitsutoshi Narukawa
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee: MITSUBISHI MATERIALS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Locke Lord LLP
- Priority: JP2009-010358 20090120
- Main IPC: C01B33/107
- IPC: C01B33/107 ; B01J8/18 ; B01J8/00 ; B01J8/34

Abstract:
An apparatus for producing trichlorosilane in which metallurgical grade silicon powder supplied to a reactor is reacted with hydrogen chloride gas while being fluidized by the hydrogen chloride gas, thereby discharging trichlorosilane generated by the reaction from the reactor, includes: a plurality of gas flow controlling members which are installed along a vertical direction in an annular shape R from an inner peripheral wall of the reactor in an internal space of the reactor; and a heat transfer tube which is installed along the vertical direction in the annular space R and through which a heating medium passes.
Public/Granted literature
- US20120164053A1 APPARATUS FOR PRODUCING TRICHLOROSILANE AND METHOD FOR PRODUCING TRICHLOROSILANE Public/Granted day:2012-06-28
Information query