Invention Grant
- Patent Title: Film coating apparatus
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Application No.: US14638426Application Date: 2015-03-04
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Publication No.: US09724710B2Publication Date: 2017-08-08
- Inventor: Masahiro Tokoh
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2014-074037 20140331
- Main IPC: B05C11/00
- IPC: B05C11/00 ; B05B5/025 ; B05B5/16 ; B05B15/04 ; B05B13/02

Abstract:
In general, according to one embodiment, a film coating apparatus includes a discharge section configured to discharge a film formation material; a voltage application section configured to apply a voltage to the film formation material, and to set the film formation material at a high potential relative to a film formation object which is subjected to film formation; a mask disposed at a position overlapping a non-coating portion of the film formation object along a direction from the discharge section toward the non-coating portion; and a potential adjusting module configured to make a potential of the mask equal to a potential of the film formation object.
Public/Granted literature
- US20150273495A1 FILM COATING APPARATUS Public/Granted day:2015-10-01
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