Invention Grant
- Patent Title: Depositing apparatus and method for measuring deposition quantity using the same
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Application No.: US13953982Application Date: 2013-07-30
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Publication No.: US09724715B2Publication Date: 2017-08-08
- Inventor: Sung-Joong Joo , You-Min Cha , Seuk-Hwan Park
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd
- Current Assignee: Samsung Display Co., Ltd
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2012-0084201 20120731
- Main IPC: C23C14/04
- IPC: C23C14/04 ; B05B12/00 ; C23C14/54

Abstract:
A deposition apparatus may uniformly control deposited quantities of a plurality of depositing sources by efficiently determining an abnormal depositing source. The deposition apparatus may reduce loss of materials by exactly determining an abnormal depositing source. The deposition apparatus includes: a plurality of depositing sources spraying a deposition material; a substrate holder fixing a substrate to face the depositing source; a depositing source shutter disposed at one side of the depositing source and opening and closing an passage of each depositing source; and a main shutter disposed between the depositing source and the substrate fixed to the substrate holder and depositing a part of the deposition material on the substrate through the main shutter.
Public/Granted literature
- US20140037849A1 DEPOSITING APPARATUS AND METHOD FOR MEASURING DEPOSITION QUANTITY USING THE SAME Public/Granted day:2014-02-06
Information query
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