Invention Grant
- Patent Title: Laser processing apparatus
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Application No.: US14953640Application Date: 2015-11-30
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Publication No.: US09724783B2Publication Date: 2017-08-08
- Inventor: Wataru Odagiri , Kouichi Nehashi , Joel Koerwer , Hironari Ohkubo , Shuichiro Tsukiji , Ryugo Oba , Kentaro Odanaka , Takashi Sampei
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP2014-243305 20141201
- Main IPC: B23K26/00
- IPC: B23K26/00 ; B23K26/06 ; B23K26/035 ; B23K26/04 ; B23K26/082 ; H01L21/78 ; B23K26/03 ; B23K26/08 ; B23K26/359 ; B23K26/0622 ; H01L21/67 ; B23K101/40

Abstract:
A laser beam irradiation unit of a laser processing apparatus includes a pulse laser oscillator, a condenser which converges and irradiates a pulse laser beam upon a workpiece held on a chuck table, a dichroic mirror disposed between the pulse laser oscillator and the condenser, a strobo flash irradiation unit which irradiates light on a route of the dichroic mirror and the condenser, a beam splitter disposed between the strobo flash irradiation unit and the dichroic mirror, and an image pickup unit disposed on the route of the light split by the beam splitter. A control unit renders the strobo flash irradiation unit and the image pickup unit operative in a timed relationship with the pulse laser beam oscillated from the pulse laser beam oscillator and irradiated upon the workpiece and detects a processed state on the basis of an image signal from the image pickup unit.
Public/Granted literature
- US20160151857A1 LASER PROCESSING APPARATUS Public/Granted day:2016-06-02
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