Invention Grant
- Patent Title: CMP pad dressers having leveled tips and associated methods
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Application No.: US14506476Application Date: 2014-10-03
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Publication No.: US09724802B2Publication Date: 2017-08-08
- Inventor: Chien-Min Sung
- Applicant: Chien-Min Sung
- Agency: Thorpe North & Western, LLP
- Agent David W. Osborne
- Main IPC: B24B53/00
- IPC: B24B53/00 ; B24B53/017 ; B24B53/12 ; B24D3/00

Abstract:
CMP pad dressers having leveled tips and associated methods are provided. In one aspect, for example, a CMP pad dresser can include a support substrate and a plurality of superabrasive particles secured to the support substrate with each superabrasive particle extending away from the support substrate to a protrusion distance, where a highest protruding tip of each of the plurality of superabrasive particles align along a designated profile with a tip variation of from about 5 microns to about 100 microns.
Public/Granted literature
- US20150133036A1 CMP PAD DRESSERS HAVING LEVELED TIPS AND ASSOCIATED METHODS Public/Granted day:2015-05-14
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