Invention Grant
- Patent Title: Robot apparatus, drive assemblies, and methods for transporting substrates in electronic device manufacturing
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Application No.: US14583460Application Date: 2014-12-26
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Publication No.: US09724834B2Publication Date: 2017-08-08
- Inventor: Izya Kremerman
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J18/02 ; B25J17/02 ; B25J9/04 ; B25J9/10

Abstract:
A substrate-transporting robot apparatus is disclosed. The robot apparatus may include an upper arm, a forearm independently rotatable relative to the upper arm, a wrist member independently rotatable relative to the forearm, and an end effector adapted to carry a substrate. In some aspects, the independent rotation is provided by a robot drive assembly having a second driving pulley mounted for rotation on a first driving pulley. In another aspect, robot drive assemblies including base-mounted and web-mounted pulleys are disclosed. Robot drive assemblies and operational methods are provided, as are numerous other aspects.
Public/Granted literature
Information query
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