Invention Grant
- Patent Title: Micromechanical sensor device and corresponding manufacturing method
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Application No.: US14953936Application Date: 2015-11-30
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Publication No.: US09725309B2Publication Date: 2017-08-08
- Inventor: Julian Gonska , Jochen Reinmuth
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102014224559 20141201
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81C1/00

Abstract:
A micromechanical sensor device includes: an ASIC substrate having a first front side and a first rear side; a rewiring element formed on the first front side and including multiple stacked conductor levels and insulating layers; a MEMS substrate having a second front side and a second rear side; a first micromechanical functional layer formed on top of the second front side; and a second micromechanical functional layer formed on top of the first micromechanical functional layer and connected to the rewiring element. In the second micromechanical functional layer, a movable sensor structure is anchored on one side via a first anchoring area, and an electrical connecting element formed in a second anchoring area is anchored on one side on the ASIC, and the first and second anchoring areas are elastically connected to one another via a spring element.
Public/Granted literature
- US20160152466A1 MICROMECHANICAL SENSOR DEVICE AND CORRESPONDING MANUFACTURING METHOD Public/Granted day:2016-06-02
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