Invention Grant
- Patent Title: Vaporizing system
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Application No.: US14794109Application Date: 2015-07-08
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Publication No.: US09725800B2Publication Date: 2017-08-08
- Inventor: Mari Kusunoki , Shinji Miyazaki
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-072425 20150331
- Main IPC: C23C14/24
- IPC: C23C14/24 ; B65D88/02 ; C23C16/448 ; C23C16/52

Abstract:
According to one embodiment, a vaporizing system comprises first and second tanks that can accumulate liquid source and first, second, and third pipes. The first pipe allows first gas to be sent out of the first tank. The second pipe allows second gas to be sent out of the second tank. The third pipe is connected to the first and second pipes and allows the first and second gas to be sent out to an external apparatus. The first tank is placed on an upper side of the second tank in a stacked manner.
Public/Granted literature
- US20160288155A1 VAPORIZING SYSTEM Public/Granted day:2016-10-06
Information query
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