- Patent Title: Method for epitaxial growth of monocrystalline silicon carbide using a feed material including a surface layer containing a polycrystalline silicon carbide with a 3C crystal polymorph
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Application No.: US13995722Application Date: 2011-06-29
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Publication No.: US09725822B2Publication Date: 2017-08-08
- Inventor: Satoshi Torimi , Satoru Nogami , Tsuyoshi Matsumoto
- Applicant: Satoshi Torimi , Satoru Nogami , Tsuyoshi Matsumoto
- Applicant Address: JP Osaka
- Assignee: TOYO TANSO CO., LTD.
- Current Assignee: TOYO TANSO CO., LTD.
- Current Assignee Address: JP Osaka
- Agency: Keating and Bennett, LLP
- Priority: JP2010-288468 20101224; JP2010-288471 20101224; JP2010-288474 20101224; JP2010-288478 20101224
- International Application: PCT/JP2011/064877 WO 20110629
- International Announcement: WO2012/086239 WO 20120628
- Main IPC: C30B19/12
- IPC: C30B19/12 ; C30B19/00 ; C30B29/36 ; C30B28/12

Abstract:
Provided is a feed material for epitaxial growth of a monocrystalline silicon carbide capable of increasing the rate of epitaxial growth of silicon carbide. A feed material 11 for epitaxial growth of a monocrystalline silicon carbide includes a surface layer containing a polycrystalline silicon carbide with a 3C crystal polymorph. Upon X-ray diffraction of the surface layer, a diffraction peak corresponding to a (111) crystal plane and a diffraction peak other than the diffraction peak corresponding to the (111) crystal plane are observed as diffraction peaks corresponding to the polycrystalline silicon carbide with a 3C crystal polymorph.
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