Invention Grant

Micropump
Abstract:
A micropump configured to control flow of an insulation fluid includes: a rectangular channel 370 configured to have a rectangular shape in which a movement passage of the insulation fluid; a planar electrode forming section 310 configured to be formed inside the rectangular channel and have a planar shape for applying an electric field; an inflow section 320 configured such that the insulation fluid flows in; and an outflow section 330 configured such that the insulation fluid flows out. Since an insulation fluid with low conductivity in a range of 10−10 to 10−12 S/m is transported with a simple technical structure without using a complicated component, it is possible to obtain the advantage of cost saving and application to various minute dynamics devices.
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