Invention Grant
- Patent Title: Thermal evaporation sources for wide-area deposition
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Application No.: US14625433Application Date: 2015-02-18
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Publication No.: US09726430B2Publication Date: 2017-08-08
- Inventor: Robert W. Birkmire , Gregory M. Hanket
- Applicant: JLN Solar, Inc.
- Applicant Address: US CA Mill Valley
- Assignee: JLN SOLAR, INC.
- Current Assignee: JLN SOLAR, INC.
- Current Assignee Address: US CA Mill Valley
- Agency: K&L Gates LLP
- Agent Louis C. Cullman; Brian J. Novak
- Main IPC: C23C16/00
- IPC: C23C16/00 ; F27B14/00 ; C23C14/24
Abstract:
A thermal evaporation sources are described. These thermal evaporation sources include a crucible configured to contain a volume of evaporant and a vapor space above the evaporant.
Public/Granted literature
- US20150168068A1 THERMAL EVAPORATION SOURCES FOR WIDE-AREA DEPOSITION Public/Granted day:2015-06-18
Information query
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