Invention Grant
- Patent Title: Light interference measuring device and program therefor
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Application No.: US14570376Application Date: 2014-12-15
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Publication No.: US09726473B2Publication Date: 2017-08-08
- Inventor: Kenji Okabe , Gyokubu Cho , Tatsuya Nagahama
- Applicant: Mitutoyo Corporation
- Applicant Address: JP Kawasaki
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kawasaki
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2013-263628 20131220
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02 ; G01B11/24

Abstract:
A light interference measuring device comprises: a light source 20 that outputs light; a beam splitter 222 that causes the light output from the light source to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light that has passed through the reference optical path and reflection light that has passed through a measuring object arranged in the measurement optical path are combined; a reference mirror 231 that is arranged in the reference optical path and that reflects light which is diverged into the reference optical path by the beam splitter 222; a stage 12 that is arranged in the measurement optical path and that has the work W placed thereon; an imaging part 25 that images an image in which the combined wave is formed; a reference mirror adjustment mechanism (234, 238, 239) that adjusts a posture of the reference mirror 231; and a control part that controls the reference mirror adjustment mechanism such that a reflecting surface of the reference mirror 231 corresponds to a measurement surface of the work W, based on an image imaged in a condition where a work W is placed on the stage.
Public/Granted literature
- US20150176967A1 LIGHT INTERFERENCE MEASURING DEVICE AND PROGRAM THEREFOR Public/Granted day:2015-06-25
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