Invention Grant
- Patent Title: Mode-matched single proof-mass dual-axis gyroscope and method of fabrication
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Application No.: US13991672Application Date: 2011-12-05
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Publication No.: US09726489B2Publication Date: 2017-08-08
- Inventor: Farrokh Ayazi , Wang-kyung Sung , Mohammad Zaman
- Applicant: Farrokh Ayazi , Wang-kyung Sung , Mohammad Zaman
- Applicant Address: US GA Atlanta
- Assignee: Georgia Tech Research Corporation
- Current Assignee: Georgia Tech Research Corporation
- Current Assignee Address: US GA Atlanta
- Agency: Burns & Levinson LLP
- Agent Bruce D. Jobse
- International Application: PCT/US2011/063315 WO 20111205
- International Announcement: WO2012/078520 WO 20120614
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5684 ; G01C25/00

Abstract:
A single proof-mass, dual-axis gyroscope apparatus comprises a resonating body member and first and second electrodes each capacitively coupled to the resonating body member by a respective lateral capacitive air gap and a vertical capacitive air gap. The width of one of the lateral capacitive air gap of the first electrode is substantially smaller than the vertical capacitive air gap. The width of one of the vertical capacitive air gap of the second electrode is substantially smaller than the lateral capacitive air gap. The apparatus claimed can address the process variation such as vertical and lateral dimension variation by electrostatic tuning method.
Public/Granted literature
- US20130283911A1 MODE-MATCHED SINGLE PROOF-MASS DUAL-AXIS GYROSCOPE AND METHOD OF FABRICATION Public/Granted day:2013-10-31
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