Invention Grant
- Patent Title: Angular velocity sensor
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Application No.: US14241950Application Date: 2012-09-03
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Publication No.: US09726490B2Publication Date: 2017-08-08
- Inventor: Masahide Tamura , Osamu Kawasaki , Takayuki Nakano , Shouhei Niikawa , Hidekazu Yano , Tetsuji Imamura
- Applicant: Masahide Tamura , Osamu Kawasaki , Takayuki Nakano , Shouhei Niikawa , Hidekazu Yano , Tetsuji Imamura
- Applicant Address: JP Toyama-shi
- Assignee: HOKURIKU ELECTRIC INDUSTRY CO., LTD.
- Current Assignee: HOKURIKU ELECTRIC INDUSTRY CO., LTD.
- Current Assignee Address: JP Toyama-shi
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2011-192127 20110902
- International Application: PCT/JP2012/072308 WO 20120903
- International Announcement: WO2013/032003 WO 20130307
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01P15/12 ; G01P15/18 ; H01L41/047 ; H01L41/08 ; G01C19/5733 ; H01L41/09 ; H01L41/113

Abstract:
Provided herein is a vibration-type angular velocity sensor capable of improving detection precision of angular velocities around the Z axis and preventing detection precision of angular velocities around the X and Y axes from deteriorating. A weight 3 is columnar or conic. The outline of an outer peripheral portion of a diaphragm 1 has such shape that a straight portion ST is formed at each of four corner portions of a square. Four vibration exciting electrodes 11 are respectively located in four regions partitioned by a first imaginary line L1 and a second imaginary line L2. Four angular velocity sensing electrodes 13 are respectively located in four regions partitioned by a first imaginary diagonal line CL1 and a second imaginary diagonal line Cl2.
Public/Granted literature
- US20140224015A1 ANGULAR VELOCITY SENSOR Public/Granted day:2014-08-14
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