Measurement apparatus
Abstract:
A measurement apparatus includes a sample stage, an excitation unit, a light receiving unit, a stimulant applying nozzle, and a spray nozzle in a measurement space inside a body case, and also includes a heating unit and a gas supplying unit. The body case includes an inner case surrounding the measurement space, and an outer case surrounding the inner case to shield the measurement space from light from the outside and seal the measurement space. The heating unit is disposed between the inner case and the outer case and adjusts temperature in the measurement space through the inner case. The gas supplying unit supplies gas having controlled temperature and humidity into the measurement space and adjusts temperature and humidity in the measurement space.
Public/Granted literature
Information query
Patent Agency Ranking
0/0