Invention Grant
- Patent Title: Method and system for performing EDS analysis
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Application No.: US14824255Application Date: 2015-08-12
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Publication No.: US09726625B2Publication Date: 2017-08-08
- Inventor: Edward Hill
- Applicant: Carl Zeiss Microscopy Ltd.
- Applicant Address: GB Cambridge
- Assignee: Carl Zeiss Microscopy Ltd.
- Current Assignee: Carl Zeiss Microscopy Ltd.
- Current Assignee Address: GB Cambridge
- Agency: Fish & Richardson P.C.
- Priority: EP14002994 20140829
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G01N23/225
Abstract:
The disclosure provides methods and systems for identifying materials using charged particle beam systems combined with x-ray spectroscopy systems.
Public/Granted literature
- US20160061754A1 METHOD AND SYSTEM FOR PERFORMING EDS ANALYSIS Public/Granted day:2016-03-03
Information query
