Invention Grant
- Patent Title: Superhydrophobic electrode and biosensing device using the same
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Application No.: US15283813Application Date: 2016-10-03
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Publication No.: US09726634B1Publication Date: 2017-08-08
- Inventor: Ali Afzali-Ardakani , Karthik Balakrishnan , Stephen W. Bedell , Pouya Hashemi , Bahman Hekmatshoartabari , Alexander Reznicek
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Louis J. Percello
- Main IPC: G01N27/414
- IPC: G01N27/414 ; G01N27/30 ; H01L29/417 ; H01L29/06 ; H01L29/20 ; H01L29/16
Abstract:
A method for making a hydrophobic biosensing device includes forming alternating layers over a top and sides of a fin on a dielectric layer to form a stack of layers. The stack of layers are planarized to expose the top of the fin. The fin and every other layer are removed to form a cathode group of fins and an anode group of fins. A hydrophobic surface on the two groups of fins.
Information query
