Invention Grant
- Patent Title: Double-sided diaphragm micro gas-preconcentrator with a back-on-face configuration
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Application No.: US14593304Application Date: 2015-01-09
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Publication No.: US09726651B2Publication Date: 2017-08-08
- Inventor: Xiaosong Du , Luhua Cheng , Penglin Wu , Huan Yuan , Yadong Jiang , Ze Wu , Yi Li , Dong Qiu
- Applicant: University of Electronic Science and Technology of China
- Applicant Address: CN Chengdu, Sichuan
- Assignee: University of Electronic Science and Technology of China
- Current Assignee: University of Electronic Science and Technology of China
- Current Assignee Address: CN Chengdu, Sichuan
- Priority: CN201210078853 20120323
- Main IPC: G01N30/08
- IPC: G01N30/08 ; H01L27/02 ; G01N30/93 ; B01L3/00 ; G01N1/40

Abstract:
A double-sided diaphragm micro gas-preconcentrator has a micro-gas chamber which is formed by stacking an upper silicon substrate with a lower silicon substrate with a back-on-face configuration. One or more suspended membranes are provided on every silicon substrate. The silicon where the suspended membrane is provided is completely removed for forming a cavity. A thin-film heater is deposited on every suspended membrane. A sorptive film is coated on an inner wall of every suspended membrane. Thus, the upper and lower sides of the preconcentrator in the present invention are suspended membranes, which improve the area of the sorptive film on the diaphragm. As a result, the preconcentrating factor is improved while keeping the small heat capacity, fast heating rate, and low power consumption features of the planar diaphragm preconcentrator.
Public/Granted literature
- US20150160172A1 Double-sided Diaphragm Micro Gas-preconcentrator with a Back-on-face Configuration Public/Granted day:2015-06-11
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