Invention Grant
- Patent Title: Angular acceleration sensor and acceleration sensor
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Application No.: US14736547Application Date: 2015-06-11
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Publication No.: US09726690B2Publication Date: 2017-08-08
- Inventor: Masahiro Kitai , Masayuki Ichimaru
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2012-271987 20121213
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G01P15/08 ; G01P15/12 ; G01P15/18 ; H01L29/84

Abstract:
An angular acceleration sensor includes a planar surface extending along an X-Y plane, a fixed portion, a weight, a beam, and piezoresistors. The weight is supported by the fixed portion. The beam extends along an Y-axis and is connected to the fixed portion and the weight. The beam includes through-holes extending therethrough in a Z-axis direction and protrusions protruding in an X-axis direction. The positions of the piezoresistors in the Y-axis direction overlap those of the through-holes and are displaced from those of the width-direction protrusions.
Public/Granted literature
- US20150276788A1 ANGULAR ACCELERATION SENSOR AND ACCELERATION SENSOR Public/Granted day:2015-10-01
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