Invention Grant
- Patent Title: Catadioptric projection objective
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Application No.: US15002492Application Date: 2016-01-21
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Publication No.: US09726870B2Publication Date: 2017-08-08
- Inventor: Alexander Epple , Vladimir Kamenov , Toralf Gruner , Thomas Schicketanz
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102009037077 20090813
- Main IPC: G02B17/08
- IPC: G02B17/08 ; G03F7/20 ; G02B1/11

Abstract:
A projection objective for microlithography for imaging an object field onto an image field includes: a first partial objective for imaging the object field onto a first real intermediate image; a second partial objective for imaging the first intermediate image onto a second real intermediate image; a third partial objective for imaging the second intermediate image onto the image field, the third partial objective including an aperture; and a first folding mirror for deflecting radiation toward a concave mirror and a second folding mirror for deflecting the radiation from the concave mirror toward the image plane; in which the projection objective is an immersion projection objective in which during operation an immersion liquid is situated between a last lens surface and an image plane, and at least one surface of at least one lens in the second partial objective has an antireflection coating including at least six layers.
Public/Granted literature
- US20160231546A1 CATADIOPTRIC PROJECTION OBJECTIVE Public/Granted day:2016-08-11
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |