Invention Grant
- Patent Title: Photoresist composition
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Application No.: US12881942Application Date: 2010-09-14
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Publication No.: US09726976B2Publication Date: 2017-08-08
- Inventor: Koji Ichikawa , Hiromu Sakamoto , Masako Sugihara , Takashi Hiraoka
- Applicant: Koji Ichikawa , Hiromu Sakamoto , Masako Sugihara , Takashi Hiraoka
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee: SUMITOMO CHEMICAL COMPANY, LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2009-215521 20090917; JP2009-215522 20090917; JP2009-215523 20090917
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039

Abstract:
A photoresist composition comprising an acid generator and a resin comprising a structural unit derived from a monomer represented by the formula (1): wherein R1 represents a hydrogen atom etc., R2 represents a hydrogen atom or a C1-C4 alkyl group, A1 represents a single bond etc., and B1 represents a group represented by the formula (1a): wherein R3, R4 and R5 each independently represents a C1-C16 aliphatic hydrocarbon group and R4 and R5 can be bonded each other to form a C3-C18 ring together with the carbon atom to which R4 and R5 are bonded, a C4-C20 saturated cyclic group having a lactone structure or a C5-C20 saturated cyclic hydrocarbon group having at least one hydroxyl group.
Public/Granted literature
- US20110065041A1 PHOTORESIST COMPOSITION Public/Granted day:2011-03-17
Information query
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