Invention Grant
- Patent Title: Stage system and a lithographic apparatus
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Application No.: US14376210Application Date: 2013-01-25
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Publication No.: US09726985B2Publication Date: 2017-08-08
- Inventor: Bastiaan Lambertus Wilhelmus Marinus Van De Ven , Antonius Franciscus Johannes De Groot , Johannes Petrus Martinus Bernardus Vermeulen , Theodorus Petrus Maria Cadee , Robertus Mathijs Gerardus Rijs , Richard Henricus Adrianus Van Lieshout
- Applicant: ASML Netherlands B.V. , Koninklijke Philips Electronics N.V.
- Applicant Address: NL Veldhoven NL Eindhoven
- Assignee: ASML Netherland B.V.,Koninklijke Philips Electronics N.V.
- Current Assignee: ASML Netherland B.V.,Koninklijke Philips Electronics N.V.
- Current Assignee Address: NL Veldhoven NL Eindhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- International Application: PCT/EP2013/051472 WO 20130125
- International Announcement: WO2013/113632 WO 20130808
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03F7/20 ; H02K41/02

Abstract:
A movable stage system is configured to support an object subjected to a lithography process. A short stroke part (SS) is configured to support the object (W) and a long stroke part (LS) is configured to support the short stroke part. The short stroke part is movable over a relative small range of movement with respect to the long stroke part. The long stroke part is movable over a relative large range of movement with respect to a base support arranged to support the long stroke part. A shielding element (SE) is arranged between the short and long stroke parts. A position control system (PCS) maintains a substantially constant distance between the shielding element and the short stroke part.
Public/Granted literature
- US20140375975A1 Stage System and a Lithographic Apparatus Public/Granted day:2014-12-25
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