Invention Grant
- Patent Title: Multi-stage system, a control method therefor, and a lithographic apparatus
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Application No.: US15258758Application Date: 2016-09-07
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Publication No.: US09726988B2Publication Date: 2017-08-08
- Inventor: Hans Butler , Johannes Petrus Martinus Bernardus Vermeulen
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G05B19/418 ; H02P25/06

Abstract:
A multi-stage system includes a stator including a plurality of electric coils; a first stage including a first magnet assembly, the first stage moveable relative to the stator; a second stage including a second magnet assembly, the second stage moveable relative to the stator; a controller configured to position the first and the second stage relative to the stator by activating, respectively, a first subset of the plurality of electric coils to interact with the first magnet assembly and a second subset of the plurality of electric coils to interact with the second magnet assembly, the controller adapted to prevent at least one electric coil, to be simultaneously shared by the first and the second subset to position the first and the second stage on the stator, from activating.
Public/Granted literature
- US20160377993A1 MULTI-STAGE SYSTEM, A CONTROL METHOD THEREFOR, AND A LITHOGRAPHIC APPARATUS Public/Granted day:2016-12-29
Information query
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