- 专利标题: Defect detection using structural information
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申请号: US14880187申请日: 2015-10-09
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公开(公告)号: US09727047B2公开(公告)日: 2017-08-08
- 发明人: Qing Luo , Kenong Wu , Hucheng Lee , Lisheng Gao , Eugene Shifrin , Yan Xiong , Shuo Sun
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corp.
- 当前专利权人: KLA-Tencor Corp.
- 当前专利权人地址: US CA Milpitas
- 代理商 Ann Marie Mewherter
- 主分类号: G05B19/401
- IPC分类号: G05B19/401 ; H01L21/66
摘要:
Systems and methods for detecting defects on a specimen based on structural information are provided. One system includes one or more computer subsystems configured for separating the output generated by a detector of an inspection subsystem in an array area on a specimen into at least first and second segments of the output based on characteristic(s) of structure(s) in the array area such that the output in different segments has been generated in different locations in the array area in which the structure(s) having different values of the characteristic(s) are formed. The computer subsystem(s) are also configured for detecting defects on the specimen by applying one or more defect detection methods to the output based on whether the output is in the first segment or the second segment.
公开/授权文献
- US20160104600A1 Defect Detection Using Structural Information 公开/授权日:2016-04-14
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