Invention Grant
- Patent Title: Defect detection using structural information
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Application No.: US14880187Application Date: 2015-10-09
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Publication No.: US09727047B2Publication Date: 2017-08-08
- Inventor: Qing Luo , Kenong Wu , Hucheng Lee , Lisheng Gao , Eugene Shifrin , Yan Xiong , Shuo Sun
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G05B19/401
- IPC: G05B19/401 ; H01L21/66

Abstract:
Systems and methods for detecting defects on a specimen based on structural information are provided. One system includes one or more computer subsystems configured for separating the output generated by a detector of an inspection subsystem in an array area on a specimen into at least first and second segments of the output based on characteristic(s) of structure(s) in the array area such that the output in different segments has been generated in different locations in the array area in which the structure(s) having different values of the characteristic(s) are formed. The computer subsystem(s) are also configured for detecting defects on the specimen by applying one or more defect detection methods to the output based on whether the output is in the first segment or the second segment.
Public/Granted literature
- US20160104600A1 Defect Detection Using Structural Information Public/Granted day:2016-04-14
Information query
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