Invention Grant
- Patent Title: In-situ spectroscopy for monitoring fabrication of integrated computational elements
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Application No.: US14414653Application Date: 2014-02-14
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Publication No.: US09727052B2Publication Date: 2017-08-08
- Inventor: James M Price , Aditya B. Nayak , David L. Perkins
- Applicant: Halliburton Energy Services, Inc.
- Applicant Address: US TX Houston
- Assignee: Halliburton Energy Services, Inc.
- Current Assignee: Halliburton Energy Services, Inc.
- Current Assignee Address: US TX Houston
- Agency: Parker Justiss, P.C.
- Agent Benjamin Fite
- International Application: PCT/US2014/016603 WO 20140214
- International Announcement: WO2015/122923 WO 20150820
- Main IPC: G01J3/00
- IPC: G01J3/00 ; G05B19/4099 ; G01J3/28 ; G01N21/31 ; B29D11/00 ; G01N21/84 ; G02B5/28 ; B32B3/26

Abstract:
Technologies are described for monitoring characteristics of layers of integrated computational elements (ICEs) during fabrication using an in-situ spectrometer operated in step-scan mode in combination with lock-in or time-gated detection. As part of the step-scan mode, a wavelength selecting element of the spectrometer is discretely scanned to provide spectrally different instances of probe-light, such that each of the spectrally different instances of the probe-light is provided for a finite time interval. Additionally, an instance of the probe-light interacted during the finite time interval with the ICE layers includes a modulation that is being detected by the lock-in or time-gated detection over the finite time interval.
Public/Granted literature
- US20160224016A1 IN-SITU SPECTROSCOPY FOR MONITORING FABRICATION OF INTEGRATED COMPUTATIONAL ELEMENTS Public/Granted day:2016-08-04
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