Invention Grant
- Patent Title: X-ray system, semiconductor package, and tray having X-ray absorption filter
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Application No.: US14455858Application Date: 2014-08-08
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Publication No.: US09728293B2Publication Date: 2017-08-08
- Inventor: Sang-Young Kim , Kyung-Soo Rho , Ho-Jeong Moon , Hyuck Shin , Sun-Nyeong Jung
- Applicant: Sang-Young Kim , Kyung-Soo Rho , Ho-Jeong Moon , Hyuck Shin , Sun-Nyeong Jung
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2013-0123584 20131016
- Main IPC: G01N23/02
- IPC: G01N23/02 ; G21K1/10 ; G01N23/04 ; H01L21/66
Abstract:
An X-ray source is disposed and a detector is disposed adjacent to the X-ray source. A test specimen holder is disposed between the X-ray source and the detector. A filter is disposed between the X-ray source and the test specimen holder. The filter has a plate-shaped semiconductor, a granular semiconductor, or a combination thereof.
Public/Granted literature
- US20150103974A1 X-RAY SYSTEM, SEMICONDUCTOR PACKAGE, AND TRAY HAVING X-RAY ABSORPTION FILTER Public/Granted day:2015-04-16
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