Invention Grant
- Patent Title: Measurement method and electron microscope
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Application No.: US15053225Application Date: 2016-02-25
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Publication No.: US09728372B2Publication Date: 2017-08-08
- Inventor: Yuji Kohno
- Applicant: JEOL Ltd.
- Applicant Address: JP Tokyo
- Assignee: JEOL Ltd.
- Current Assignee: JEOL Ltd.
- Current Assignee Address: JP Tokyo
- Agency: The Webb Law Firm
- Priority: JP2015-38469 20150227
- Main IPC: H01J37/28
- IPC: H01J37/28 ; H01J37/05 ; H01J37/22

Abstract:
A measurement method capable of easily measuring the directions of detector segments of a segmented detector relative to a scanning transmission electron microscope (STEM) image is provided. The measurement method is for use in an electron microscope equipped with the segmented detector having a detection surface divided into the detector segments. The measurement method is used to measure the directions of the detector segments relative to the STEM image. The method involves defocusing the STEM image to thereby cause a deviation of the STEM image and measuring the directions of the detector segments relative to the STEM image from the direction of the deviation of the STEM image (step S11).
Public/Granted literature
- US20160254118A1 Measurement Method and Electron Microscope Public/Granted day:2016-09-01
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