Invention Grant
- Patent Title: Multiple gas injection system
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Application No.: US15004143Application Date: 2016-01-22
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Publication No.: US09728375B2Publication Date: 2017-08-08
- Inventor: Jorgen Rasmussen , Kevin C. Malinak
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent John B. Kelly
- Main IPC: H01J37/30
- IPC: H01J37/30 ; H01J37/02 ; H01J37/16 ; F16K11/07 ; B05B1/00 ; B05B1/30

Abstract:
A multi-positional valve is used to control the destination of gas flows from multiple gas sources. In one valve position the gases flow to an isolated vacuum system where the flow rate and mixture can be adjusted prior to introduction into a sample vacuum chamber. In another valve position the pre-mixed gases flow from the isolated vacuum chamber and through a needle into the sample vacuum chamber.
Public/Granted literature
- US20160155607A1 MULTIPLE GAS INJECTION SYSTEM Public/Granted day:2016-06-02
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