Invention Grant
- Patent Title: Method for controlling an RF generator
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Application No.: US15223984Application Date: 2016-07-29
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Publication No.: US09728378B2Publication Date: 2017-08-08
- Inventor: Imran Ahmed Bhutta , Tomislav Lozic
- Applicant: Reno Technologies, Inc.
- Assignee: Reno Technologies, Inc.
- Current Assignee: Reno Technologies, Inc.
- Agency: The Belles Group, P.C.
- Main IPC: H05H1/46
- IPC: H05H1/46 ; H01J7/24 ; H01J37/32 ; H03F3/195 ; H03F1/02 ; H01L21/02 ; H01L21/311

Abstract:
In one embodiment, an RF generator includes an RF amplifier comprising an RF input, a DC input, and an RF output, the RF amplifier configured to receive at the RF input an RF signal from an RF source; receive at the DC input a DC voltage from a DC source; and provide an output power at the RF output; and a control unit operably coupled to the DC source and the RF source, the control unit configured to receive a power setpoint indicative of a desired output power at the RF output; determine a power dissipation at the RF generator; alter the DC voltage to decrease the power dissipation at the RF generator; and alter the RF signal to enable the output power at the RF output to be substantially equal to the power setpoint.
Public/Granted literature
- US20160336150A1 METHOD FOR CONTROLLING AN RF GENERATOR Public/Granted day:2016-11-17
Information query
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