Invention Grant
- Patent Title: Mass analyzing electromagnet and ion beam irradiation apparatus
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Application No.: US14876263Application Date: 2015-10-06
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Publication No.: US09728390B2Publication Date: 2017-08-08
- Inventor: Junichi Tatemichi , Shojiro Dohi , Ippei Nishimura
- Applicant: NISSIN ION EQUIPMENT CO., LTD.
- Applicant Address: JP Kyoto-shi
- Assignee: Nissin Ion Equipment Co., Ltd.
- Current Assignee: Nissin Ion Equipment Co., Ltd.
- Current Assignee Address: JP Kyoto-shi
- Agency: Sughrue Mion, PLLC
- Priority: JP2014-224753 20141104
- Main IPC: H01J49/00
- IPC: H01J49/00 ; H01J49/30 ; H01J49/20 ; H01J37/317 ; H01J37/147 ; H01J37/05

Abstract:
A mass analyzing electromagnet is provided. The mass analyzing electromagnet includes an analysis tube having an internal zone formed as a passage for the ion beam; and a shield member mounted to an inner wall surface of the analyzing tube, a portion of the shield member intersecting with a direction perpendicular to a traveling direction of an ion beam and a mass-based separation direction of the ion beam so as to block a portion of the ion beam.
Public/Granted literature
- US20160126082A1 MASS ANALYZING ELECTROMAGNET AND ION BEAM IRRADIATION APPARATUS Public/Granted day:2016-05-05
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