Invention Grant
- Patent Title: Organic film composition, process for forming organic film, patterning process, and compound
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Application No.: US15091336Application Date: 2016-04-05
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Publication No.: US09728420B2Publication Date: 2017-08-08
- Inventor: Daisuke Kori , Kazumi Noda , Kazunori Maeda , Rie Kikuchi , Tsutomu Ogihara
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2015-098795 20150514
- Main IPC: H01L21/31
- IPC: H01L21/31 ; C07C219/32 ; G03F7/11 ; C07C69/94 ; C07C317/22 ; C07C69/84 ; H01L21/32 ; H01L21/324 ; H01L21/3105 ; H01L21/311 ; C07C69/33 ; C07C69/76 ; C07C219/14 ; G03F7/09

Abstract:
An organic film composition including a compound represented by the following general formula (1), wherein n1 and n2 each independently represent 0 or 1; “W” represents a single bond or any of structures represented by the following formula (2); R1 represents any of structures represented by the following general formula (3); m1 and m2 each independently represent an integer of 0 to 7, with the proviso that m1+m2 is 1 to 14. There can be provided an organic film composition for forming an organic film having dry etching resistance as well as advanced filling/planarizing characteristics.
Public/Granted literature
- US20160336189A1 ORGANIC FILM COMPOSITION, PROCESS FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPOUND Public/Granted day:2016-11-17
Information query
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