Invention Grant
- Patent Title: Single use rinse in a linear Marangoni drier
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Application No.: US13932698Application Date: 2013-07-01
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Publication No.: US09728428B2Publication Date: 2017-08-08
- Inventor: Brian J. Brown
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67
Abstract:
An apparatus for drying of wet substrates in a post CMP cleaning apparatus is provided. The apparatus provides a waterfall or shallow reservoir of rinsing solution, such as DIW, through which a substrate may be lifted. A solvent vapor may be provided at the rinsing solution interface on the substrate, such as in a Marangoni process. In certain embodiments, the volume of solution through which the substrate is lifted is reduced, which may provide for reduced or eliminated particle reattachment to the substrate.
Public/Granted literature
- US20150000711A1 SINGLE USE RINSE IN A LINEAR MARANGONI DRIER Public/Granted day:2015-01-01
Information query
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