Invention Grant
- Patent Title: Method for producing an electrostatic holding apparatus
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Application No.: US14724215Application Date: 2015-05-28
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Publication No.: US09728438B2Publication Date: 2017-08-08
- Inventor: Alexander Stein
- Applicant: Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Applicant Address: DE Berlin
- Assignee: Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Current Assignee: Berliner Glas KGaA Herbert Kubatz GmbH & Co.
- Current Assignee Address: DE Berlin
- Agency: Caesar Rivise, PC
- Priority: DE102014008030 20140528
- Main IPC: H01L21/683
- IPC: H01L21/683

Abstract:
Production of a holding apparatus (100) for electrostatically holding a component, e.g., silicon wafer (1), includes connecting plate-type first holding element (11, 12) and plate-type core element (13), first holding element (11, 12) having first electrode device (20) and spanning support surface for receiving component (1), and the connecting includes the steps: providing liquid adhesive to at least one of the mutually facing surfaces of first holding element (11, 12) and core element (13), aligning first holding element (11, 12) with first forming tool (40) such that support surface is matched to predetermined master surface (41) of first forming tool (40), and curing the adhesive, wherein first adhesive connecting layer (15) is formed, which has thickness variations constituted by form deviations between support surface and at least one of the mutually facing surfaces. Also described is a holding apparatus (100) configured to electrostatically hold a component, e.g., silicon wafer (1).
Public/Granted literature
- US20150348816A1 METHOD FOR PRODUCING AN ELECTROSTATIC HOLDING APPARATUS Public/Granted day:2015-12-03
Information query
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