Invention Grant
- Patent Title: Non-transparent microelectronic grade glass as a substrate, temporary carrier or wafer
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Application No.: US14525267Application Date: 2014-10-28
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Publication No.: US09728440B2Publication Date: 2017-08-08
- Inventor: Charles L. Arvin , Harry D. Cox , Brian M. Erwin , Jorge A. Lubguban , Eric D. Perfecto , Jennifer D. Schuler
- Applicant: International Business Machines Corporation
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: B32B41/00
- IPC: B32B41/00 ; H01L21/683 ; B32B9/04 ; B32B17/06 ; B32B7/12 ; B32B7/06 ; H01L21/66
Abstract:
A method for processing a semiconductor wafer where an opaque layer is located on a surface of a handling wafer is used so the surface of the handling wafer may be detected through optical sensors. The opaque layer may be modified, or oriented, to allow light to pass through unobstructed.
Public/Granted literature
- US20160118287A1 NON-TRANSPARENT MICROELECTRONIC GRADE GLASS AS A SUBSTRATE, TEMPORARY CARRIER OR WAFER Public/Granted day:2016-04-28
Information query
