Invention Grant
- Patent Title: Method for singulating an assemblage into semiconductor chips, and semiconductor chip
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Application No.: US14647071Application Date: 2013-11-08
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Publication No.: US09728459B2Publication Date: 2017-08-08
- Inventor: Mathias Kaempf
- Applicant: OSRAM Opto Semiconductors GmbH
- Applicant Address: DE Regensburg
- Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee: OSRAM Opto Semiconductors GmbH
- Current Assignee Address: DE Regensburg
- Agency: McDermott Will & Emery LLP
- Priority: DE102012111358 20121123
- International Application: PCT/EP2013/073394 WO 20131108
- International Announcement: WO2014/079708 WO 20140530
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/78 ; H01L33/00

Abstract:
A method for singulating an assemblage (1) into a plurality of semiconductor chips (10) is specified, wherein an assemblage comprising a carrier (4), a semiconductor layer sequence (2) and a metallic layer (3) is provided. Separating trenches (45) are formed in the carrier. The assemblage is subjected to mechanical loading, with the result that the metallic layer breaks along the separating trenches and the assemblage is singulated into semiconductor chips, wherein the singulated semiconductor chips each have part of the semiconductor layer sequence, of the carrier and of the metallic layer. A semiconductor chip (10) is furthermore specified.
Public/Granted literature
- US20150303112A1 METHOD FOR SINGULATING AN ASSEMBLAGE INTO SEMICONDUCTOR CHIPS, AND SEMICONDUCTOR CHIP Public/Granted day:2015-10-22
Information query
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