Semiconductor chips with seal rings and electronic test structures, semiconductor wafers including the semiconductor chips, and methods for fabricating the same
Abstract:
A semiconductor chip includes an active area including a plurality of integrated circuit structures, a seal ring enclosing the active area, a corner area of the semiconductor chip that is outside of the seal ring, and an electronic test structure disposed within the corner area. Semiconductor wafers including the above-noted semiconductor chips, as well as methods for fabricating semiconductor wafers including the above-noted semiconductor chips, are also disclosed.
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