- Patent Title: Semiconductor chips with seal rings and electronic test structures, semiconductor wafers including the semiconductor chips, and methods for fabricating the same
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Application No.: US15278257Application Date: 2016-09-28
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Publication No.: US09728474B1Publication Date: 2017-08-08
- Inventor: Wanbing Yi , Juan Boon Tan , Mahesh Bhatkar , Danny Pak-Chum Shum
- Applicant: Globalfoundries Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L23/10
- IPC: H01L23/10 ; H01L21/66 ; H01L23/31 ; H01L23/485 ; H01L43/08

Abstract:
A semiconductor chip includes an active area including a plurality of integrated circuit structures, a seal ring enclosing the active area, a corner area of the semiconductor chip that is outside of the seal ring, and an electronic test structure disposed within the corner area. Semiconductor wafers including the above-noted semiconductor chips, as well as methods for fabricating semiconductor wafers including the above-noted semiconductor chips, are also disclosed.
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