Invention Grant
- Patent Title: Hybrid bond using a copper alloy for yield improvement
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Application No.: US14806888Application Date: 2015-07-23
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Publication No.: US09728521B2Publication Date: 2017-08-08
- Inventor: Yu-Cheng Tsai , Chun-Chieh Chuang , Ching-Chun Wang , Dun-Nian Yaung , Feng-Chi Hung , Chih-Hui Huang , Yan-Chih Lu , Ju-Shi Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L25/065
- IPC: H01L25/065 ; H01L23/528 ; H01L23/532 ; H01L25/00 ; H01L23/00 ; H01L23/522 ; H01L21/768 ; H01L21/321 ; H01L21/311 ; H01L21/02

Abstract:
An integrated circuit (IC) using a copper-alloy based hybrid bond is provided. The IC comprises a pair of semiconductor structures vertically stacked upon one another. The pair of semiconductor structures comprise corresponding dielectric layers and corresponding metal features arranged in the dielectric layers. The metal features comprise a copper alloy having copper and a secondary metal. The IC further comprises a hybrid bond arranged at an interface between the semiconductor structures. The hybrid bond comprises a first bond bonding the dielectric layers together and a second bond bonding the metal features together. The second bond comprises voids arranged between copper grains of the metal features and filled by the secondary metal. A method for bonding a pair of semiconductor structures together using the copper-alloy based hybrid bond is also provided.
Public/Granted literature
- US20170025381A1 HYBRID BOND USING A COPPER ALLOY FOR YIELD IMPROVEMENT Public/Granted day:2017-01-26
Information query
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