Invention Grant
- Patent Title: Static random-access memory (SRAM) cell array and forming method thereof
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Application No.: US15185043Application Date: 2016-06-17
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Publication No.: US09728541B1Publication Date: 2017-08-08
- Inventor: Chun-Hsien Huang , Yu-Tse Kuo , Shu-Ru Wang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L27/11 ; H01L29/78 ; H01L29/66

Abstract:
A static random-access memory (SRAM) cell array forming method includes the following steps. A plurality of fin structures are formed on a substrate, wherein the fin structures include a plurality of active fins and a plurality of dummy fins, each PG (pass-gate) FinFET shares at least one of the active fins with a PD (pull-down) FinFET, and at least one dummy fin is disposed between the two active fins having two adjacent pull-up FinFETs thereover in a static random-access memory cell. At least a part of the dummy fins are removed. The present invention also provides a static random-access memory (SRAM) cell array formed by said method.
Information query
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