Invention Grant
- Patent Title: 3D semicircular vertical NAND string with self aligned floating gate or charge trap cell memory cells and methods of fabricating and operating the same
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Application No.: US14748670Application Date: 2015-06-24
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Publication No.: US09728546B2Publication Date: 2017-08-08
- Inventor: Andrey Serov , James K. Kai , Yanli Zhang , Henry Chien , Johann Alsmeier
- Applicant: SANDISK TECHNOLOGIES INC.
- Applicant Address: US TX Plano
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Plano
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11556 ; H01L27/11582 ; H01L27/11565 ; H01L27/11519 ; G11C16/04 ; H01L29/66 ; H01L27/11524 ; H01L27/1157 ; G11C16/14

Abstract:
A three dimensional NAND device includes a common vertical channel and electrically isolated control gate electrodes on different lateral sides of the channel in each device level to form different lateral portions of a memory cell in each device level. Dielectric separator structures are located between and electrically isolate the control gate electrodes. The lateral portions of the memory cell in each device level may be electrically isolated by at least one of doping ungated portions of the channel adjacent to the separator structures or storing electrons in the separator structure.
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