- 专利标题: Solid-state imaging device and electronic apparatus
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申请号: US14892314申请日: 2014-05-19
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公开(公告)号: US09728569B2公开(公告)日: 2017-08-08
- 发明人: Naoyuki Sato
- 申请人: SONY CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Sheridan Ross P.C.
- 优先权: JP2013-115798 20130531
- 国际申请: PCT/JP2014/063209 WO 20140519
- 国际公布: WO2014/192576 WO 20141204
- 主分类号: H01L27/14
- IPC分类号: H01L27/14 ; H01L27/146 ; H04N5/3745 ; H01L21/762
摘要:
The present disclosure relates to a solid-state imaging device, an electronic apparatus, and a manufacturing method that are designed to further increase conversion efficiency. A solid-state imaging device includes a pixel in which element separation is realized by a first trench element separation region having a trench structure in a region between an FD unit and an amplifying transistor among element separation elements separating the elements constituting the pixel from one another, and a second trench element separation region having a trench structure in a region other than the region between the FD unit and the amplifying transistor among the element separation regions separating the elements constituting the pixel from one another, and the first trench element separation region is deeper than the second trench element separation region. The present technology can be applied to CMOS image sensors, for example.
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