Invention Grant
- Patent Title: Replacement metal gate transistor
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Application No.: US13921731Application Date: 2013-06-19
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Publication No.: US09728623B2Publication Date: 2017-08-08
- Inventor: Ying Zhang , Steven Sherman
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/423 ; H01L29/51 ; H01L21/28 ; H01L29/40 ; H01L29/49 ; H01L29/78 ; H01L21/3213 ; H01L21/311

Abstract:
A replacement metal gate transistor is described. Various examples provide a replacement metal gate transistor including a trench, a first sidewall and a second sidewall. A layer is disposed in the trench where the layer has a bottom section disposed on a bottom of the trench and sidewall sections disposed on the first and second sidewalls, wherein the sidewall sections of the layer are at least 50% thinner than the bottom section of the layer.
Public/Granted literature
- US20140374843A1 REPLACEMENT METAL GATE TRANSISTOR Public/Granted day:2014-12-25
Information query
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