Invention Grant
- Patent Title: Semiconductor device with one-side-contact and method for fabricating the same
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Application No.: US14981306Application Date: 2015-12-28
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Publication No.: US09728638B2Publication Date: 2017-08-08
- Inventor: Jin-Ku Lee , Young-Ho Lee , Mi-Ri Lee
- Applicant: SK hynix Inc.
- Applicant Address: KR Gyeonggi-do
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2009-0093500 20090930
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L21/285 ; H01L27/108 ; H01L29/417 ; H01L29/423

Abstract:
A method for fabricating a semiconductor device includes forming a first conductive layer doped with an impurity for forming a cell junction over a semiconductor substrate, forming a second layer over the first conductive layer, forming a plurality of active regions by etching the second layer and the first conductive layer, the plurality of the active regions being separated from one another by trenches, forming a side contact connected to a sidewall of the first conductive layer, and forming a plurality of metal bit lines each connected to the side contact and filling a portion of each trench.
Public/Granted literature
- US20160111535A1 SEMICONDUCTOR DEVICE WITH ONE-SIDE-CONTACT AND METHOD FOR FABRICATING THE SAME Public/Granted day:2016-04-21
Information query
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