Piezoelectric element, piezoelectric actuator device, liquid ejecting head, liquid ejecting apparatus, and ultrasonic wave measurement apparatus
Abstract:
A piezoelectric element in which a first electrode, a piezoelectric body layer comprised of a composite oxide having a perovskite structure that includes at least Pb, Nb and Ti, and a second electrode are sequentially laminated on a substrate, in which a crystal that configures the piezoelectric body layer has a tetragonal structure, and the crystal is {100} oriented to the substrate, and in which a region having a (100) plane and a region having a (001) plane that are perpendicular with respect to a direction of lamination, are mixed inside a lattice of the crystal.
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