Invention Grant
- Patent Title: Piezoelectric element, piezoelectric actuator device, liquid ejecting head, liquid ejecting apparatus, and ultrasonic wave measurement apparatus
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Application No.: US15118222Application Date: 2015-03-18
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Publication No.: US09728709B2Publication Date: 2017-08-08
- Inventor: Takayuki Yonemura , Yasuhiro Itayama , Chikara Kojima
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-055580 20140318; JP2014-255509 20141217
- International Application: PCT/JP2015/001518 WO 20150318
- International Announcement: WO2015/141223 WO 20150924
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/18 ; H01L41/047 ; B06B1/06 ; B41J2/14

Abstract:
A piezoelectric element in which a first electrode, a piezoelectric body layer comprised of a composite oxide having a perovskite structure that includes at least Pb, Nb and Ti, and a second electrode are sequentially laminated on a substrate, in which a crystal that configures the piezoelectric body layer has a tetragonal structure, and the crystal is {100} oriented to the substrate, and in which a region having a (100) plane and a region having a (001) plane that are perpendicular with respect to a direction of lamination, are mixed inside a lattice of the crystal.
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