Invention Grant
- Patent Title: On chip antenna with opening
-
Application No.: US14687002Application Date: 2015-04-15
-
Publication No.: US09728838B2Publication Date: 2017-08-08
- Inventor: Hanyi Ding , Mark D. Jaffe , Alvin J. Joseph , Anthony K. Stamper
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon, P.C.
- Agent David Cain; Andrew M. Calderon
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L23/52 ; H01Q1/22 ; H01L21/762 ; H01Q9/16
Abstract:
Approaches for an on-chip antenna are provided. A method includes forming an antenna in an insulator layer at a front side of a substrate. The method also includes forming a trench in the substrate underneath the antenna. The method further includes forming a fill material in the trench. The substrate is composed of a material having a first dielectric constant. The fill material has a second dielectric constant that is less than the first dielectric constant.
Public/Granted literature
- US20160308270A1 ON CHIP ANTENNA WITH OPENING Public/Granted day:2016-10-20
Information query
IPC分类:
