Invention Grant
- Patent Title: Electron injector and free electron laser
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Application No.: US15035674Application Date: 2014-11-27
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Publication No.: US09728931B2Publication Date: 2017-08-08
- Inventor: Andrey Alexandrovich Nikipelov , Vadim Yevgenyevich Banine , Pieter Willem Herman De Jager , Gosse Charles De Vries , Olav Waldemar Vladimir Frijns , Leonardus Adrianus Gerardus Grimminck , Andelko Katalenic , Johannes Antonius Gerardus Akkermans , Erik Loopstra , Wouter Joep Engelen , Petrus Rutgerus Bartraij , Teis Johan Coenen , Wilhelmus Patrick Elisabeth Maria Op'T Root
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP13195806 20131205; EP13196853 20131212; EP14156258 20140221
- International Application: PCT/EP2014/075784 WO 20141127
- International Announcement: WO2015/082295 WO 20150611
- Main IPC: H01S3/09
- IPC: H01S3/09 ; H01J1/34 ; H05H7/08
Abstract:
An injector arrangement for providing an electron beam. The injector arrangement comprises a first injector for providing electron bunches, and a second injector for providing electrons bunches. The injector arrangement is operable in a first mode in which the electron beam comprises electron bunches provided by the first injector only and a second mode in which the electron beam comprises electron bunches provided by the second injector only.
Public/Granted literature
- US20160301180A1 ELECTRON INJECTOR AND FREE ELECTRON LASER Public/Granted day:2016-10-13
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