Invention Grant
- Patent Title: Method of manufacture for a silicon-on-plastic semiconductor device with interfacial adhesion layer
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Application No.: US14715830Application Date: 2015-05-19
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Publication No.: US09735044B2Publication Date: 2017-08-15
- Inventor: Julio C. Costa
- Applicant: RF Micro Devices, Inc.
- Applicant Address: US NC Greensboro
- Assignee: Qorvo US, Inc.
- Current Assignee: Qorvo US, Inc.
- Current Assignee Address: US NC Greensboro
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/762 ; H01L27/12 ; H01L23/29 ; H01L23/36 ; H01L23/373 ; H01L29/786 ; H01L23/31 ; H01L21/56

Abstract:
A semiconductor device and methods for manufacturing the same are disclosed. The semiconductor device includes a polymer substrate and an interfacial layer over the polymer substrate. A buried oxide layer resides over the interfacial layer, and a device layer with at least a portion of a field effect device resides over the buried oxide layer. The polymer substrate is molded over the interfacial adhesion layer and has a thermal conductivity greater than 2 watts per meter Kelvin (W/mK) and an electrical resistivity greater than 1012 Ohm-cm. Methods of manufacture for the semiconductor device include removing a wafer handle to expose a first surface of the buried oxide layer, disposing the interfacial adhesion layer onto the first surface of the buried oxide layer, and molding the polymer substrate onto the interfacial adhesion layer.
Public/Granted literature
- US09812350B2 Method of manufacture for a silicon-on-plastic semiconductor device with interfacial adhesion layer Public/Granted day:2017-11-07
Information query
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