Invention Grant
- Patent Title: Microelectromechanical structure with enhanced rejection of acceleration noise
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Application No.: US15140349Application Date: 2016-04-27
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Publication No.: US09739613B2Publication Date: 2017-08-22
- Inventor: Luca Coronato , Gabriele Cazzaniga
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: ITTO2009A0371 20090511
- Main IPC: G01C19/5712
- IPC: G01C19/5712 ; G01C19/5747 ; G01C19/02

Abstract:
An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.
Public/Granted literature
- US20170059322A1 MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE Public/Granted day:2017-03-02
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