Invention Grant
- Patent Title: Systems and methods for pressure differential molecular spectroscopy of compressible fluids
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Application No.: US15290684Application Date: 2016-10-11
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Publication No.: US09739708B2Publication Date: 2017-08-22
- Inventor: Vidi A. Saptari
- Applicant: MKS Instruments, Inc. , Pason Systems Corp.
- Applicant Address: US MA Andover CA Calgary
- Assignee: MKS Instruments, Inc.,Pason Systems Corp.
- Current Assignee: MKS Instruments, Inc.,Pason Systems Corp.
- Current Assignee Address: US MA Andover CA Calgary
- Agency: Choate, Hall & Stewart LLP
- Agent William R. Haulbrook; Margo R. Monroe
- Main IPC: G01N21/3518
- IPC: G01N21/3518 ; G01N33/22 ; G01N21/3504 ; G01N21/05 ; G01N21/31 ; G01N21/359 ; G01N21/35

Abstract:
Described herein is a spectroscopic system and method for measuring and monitoring the chemical composition and/or impurity content of a sample or sample stream using absorption light spectroscopy. Specifically, in certain embodiments, this invention relates to the use of sample pressure variation to alter the magnitude of the absorption spectrum (e.g., wavelength-dependent signal) received for the sample, thereby obviating the need for a reference or ‘zero’ sample. Rather than use a reference or ‘zero’ sample, embodiments described herein obtain a spectrum/signal from a sample-containing cell at both a first pressure and a second (different) pressure.
Public/Granted literature
- US20170030829A1 SYSTEMS AND METHODS FOR PRESSURE DIFFERENTIAL MOLECULAR SPECTROSCOPY OF COMPRESSIBLE FLUIDS Public/Granted day:2017-02-02
Information query
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