- 专利标题: Monitoring device, ion implantation device, and monitoring method
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申请号: US15003311申请日: 2016-01-21
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公开(公告)号: US09741534B2公开(公告)日: 2017-08-22
- 发明人: Makoto Ishida
- 申请人: LAPIS Semiconductor Co., Ltd.
- 申请人地址: JP Yokohama
- 专利权人: LAPIS SEMICONDUCTOR CO., LTD.
- 当前专利权人: LAPIS SEMICONDUCTOR CO., LTD.
- 当前专利权人地址: JP Yokohama
- 代理机构: Volentine & Whitt, PLLC
- 优先权: JP2015-013460 20150127
- 主分类号: H01J37/304
- IPC分类号: H01J37/304 ; H01J37/36 ; H01J37/317 ; H01J37/244 ; G01R19/00
摘要:
A monitoring device includes a filtering section that extracts and outputs at least one of a high frequency component or a low frequency component of a beam current received from a detection output section of an ion implantation device; and a computation section that computes at least one of a value corresponding to a content ratio of the high frequency component in the beam current, or a value corresponding to a content ratio of the low frequency component in the beam current.
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